What is the difference between standard cubic centimeters per minute (SCCM) and cubic centimeters per minute (CCM)? - Quora
![SOLVED: (01)In Orthogonal Design for Process Optimization and Its Application to Plasma Etching, G,2. Yin and D.W.Jille describesan experiment to determine the ffect of Hexafluoroethane (CzFo) flowrate on the uniformity of theetch SOLVED: (01)In Orthogonal Design for Process Optimization and Its Application to Plasma Etching, G,2. Yin and D.W.Jille describesan experiment to determine the ffect of Hexafluoroethane (CzFo) flowrate on the uniformity of theetch](https://cdn.numerade.com/ask_images/df789399dc0b41d396ba6db79c8d42ef.jpg)
SOLVED: (01)In Orthogonal Design for Process Optimization and Its Application to Plasma Etching, G,2. Yin and D.W.Jille describesan experiment to determine the ffect of Hexafluoroethane (CzFo) flowrate on the uniformity of theetch
![Summary of the selected experimental conditions. Legend: sccm, standard... | Download Scientific Diagram Summary of the selected experimental conditions. Legend: sccm, standard... | Download Scientific Diagram](https://www.researchgate.net/publication/339094108/figure/tbl1/AS:855925615251456@1581079977072/Summary-of-the-selected-experimental-conditions-Legend-sccm-standard-cubic-centimeters.png)